当前位置:产品展示 > 废气处理设备 CT-W水洗废气处理设备(centrotherm)

CT-W水洗废气处理设备(centrotherm)

作者:admin 发布日期:2015-08-25 17:01:13点击:1437

 

 

CT-W水洗废气处理设备(centrotherm)

CT-W

Wet scrubbers for waste gas treatment

The CT-W wet scrubber is a proven solution for the treatment of waste gases emitted in different CVD and etching applications. One advantage over common wet scrubbers is a special CT-W feature that reduces up to 99% of the dust particles in the waste gas flow. The absorbed dust particles are automatically discharged with the waste water.
Another advantage of the centrotherm CT-W is the special design of the waste gas inlets, which successfully prevents the build up of solid reaction by-products.
The CT-W can be installed as a stand alone unit (independent system) or upstream from an existing CT-BW module as a pre-scrubber.

The CT-W wet scrubber is designed to treat HCl, HF, SiH2Cl2, SiCl4 and NH3, as well as other acidic and alkaline gaseous emissions efficiently, while keeping the CoO low. Depending on the species that needs to be treated the CT-W is operated either with an alkaline or acidic neutralizing agent. The packed media washing tower is equipped with high performance counter flow spray nozzles that provide significant reliability for applications with high waste gas flow rates. The CT-W provides up to four independent inlets, each one equipped with a bypass, that can be connected to atmospheric and sub-atmospheric process chambers with up to 3,000 slm total waste gas load.
Other great advantages are the unique N2 venturi and the heated inlets, that ensure low maintenance requirements and a low cost of ownership, especially for gases like WF6, BCl3, AlCl3 or NH4Cl, that tend to block the inlets over time.

Features & benefits

  • Destruction and removal efficiency (DRE) of up to 99.99 %
  • Improved particle reduction
  • Low cost of ownership
  • Uptime greater than 99%
  • Up to four waste gas inlets
  • Waste gas inlets equipped with bypass valves
  • Waste gas flow up to 3,000 slm
  • Explosion-proof design available
  • Monitoring interface for Ethernet or RS485
  • Easy and fast maintenance
  • In compliance with international safety standards and regulations:

    - SEMI S2
    - NFPA79:2002
    - EN / ISO 14121-1: 2007
    - EN / ISO 13849-1: 2008
    - EN60204-1: 2006
    - MD2006/EC/42-Annex I: 2006