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CT-BW燃烧水洗废水处理设备(centrotherm)

作者:admin 发布日期:2015-08-25 16:25:37点击:2426

 

 

CT-BW

Burn-Wet Systems for waste gas treatment

The CT-BW point-of-use abatement is a highly efficient system used in CVD and etching applications for photovoltaic, semiconductor and related industries. As new process tools and technologies with highly corrosive gases and increasing gas loads are introduced, further improvements in abatement technologies are needed. The CT-BW meets those requirements and is in compliance with international safety standards. furthermore it provides a couple of advantages such as a high destruction removal efficiency for all waste gases from CVD and etching processes, especially for PFCs as well as all kinds of solid and gaseous reaction by-products. The system was designed for a reliable, resource- conserving performance even under harsh process conditions. The separation of the functional units such as burner, combustion chamber, wet scrubber, waste gas inlet and cooling system allows a flexible setup for each application. The customized abatement configuration is key to keep the maintenance interval as long as possible and to maximize the uptime.

  • Total waste gas load of up to 500 slm per module
  • Efficient treatment of deposition & etch gases
  • Improved particle reduction
  • Monitored emergency bypass dilution
  • Increased reactor volume for greater DRE

Features & benefits

  • Destruction and removal efficiency (DRE) of up to 99.99 %
  • Modularity

    - One electrical cabinet for up to four individual modules
    - Cabinets are isolated from each other
    - Each module has its own independent safety chain
      (sensors, probes, etc.)
  • One hook-up point for each media for up to 4 modules
  • Customized back-up configurations
  • Low CoO due to process dependant burner performance
  • Improved corrosion resistant reactor top plate
  • Top-down burner design minimizes clogging of burner nozzles
  • Water flushed reactor chamber prevents corrosion and clogging
  • Easy and fast maintenance due to optimized interior design
  • Automatic waste gas inlet cleaning device for increased MTBPM
  • Graphical user interface with help text for easy troubleshooting
  • Monitoring interface for Ethernet or RS485
  • Tailor-made abatement setup to meet various process requirements
  • Wide range of fuel gases like LNG, city gas, coal gas, hydrogen, propane, butane, etc.
  • Individual temperature adjustment and rinsing of waste gas inlet piping
  • Made in Germany
  • In compliance with international safety standards and regulations

    - SEMI S2-0706
    - SEMI S8-0308
    - SEMI S14-0704
    - NFPA79: 2007
    - EN / ISO 14121-1: 2007
    - EN / ISO 13849-1: 2008
    - EN60204-1: 2006
    - MD2006/EC/42-Annex I: 2006
  • CT-BW 2009

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